I already found it's language issue when do self-extraction. after change the language to English (united state), it could install.
I changed two places. one is region option - > standard and formats. another place is advanced -> non-unicode setting. Unfortunately, I have to reboot server after change the above language settings.
I check the CLI cmd, it has a option /L language_id. I am not sure if i could help. I did not find a documents which explain the CLI installation.